運動行程（mm）

Travel (mm)

1000X1200X200

1200X1500X200

1500X2000X200

外形尺寸（長）X（寬）X（高）(mm)

Dimension (L)X(W)X(H)(mm)

1678X2140X1700

1878X2440X1700

2178X2940X1700

重量(kg)

Weight(kg)

2500

4000

5500

測量承重(kg）

Measuring Load (kg)

50

50

50

X/Y 軸測量精度(μm)

X/Y axis Measuring Accuracy

E2(X/Y)=（3+L/200）

光柵尺

Grating ruler

LAMOTION  0.5um高精度金屬貼片尺

LAMOTION 0.5um high precision metal patch ruler

導(dǎo)軌

Guide

中國臺灣SHAC高精密級直線導(dǎo)軌

Taiwan SHAC high precision linear guide

傳動方式

Drive Method

中國臺灣TBI高精密級研磨滾珠絲桿

Taiwan TBI high precision grinding ball screw.

CCD

HIKROBOT 130萬像素數(shù)字相機(jī)

HIKROBOT 1.3 million pixel digital camera

光源

Lighting

下輪廓燈

Under contour light

LED 平行輪廓冷光

LED parallel profile cold light

上表面燈

Surface Light

可程式LED五環(huán)八分區(qū)環(huán)形表面冷光源，帶激光指示器

Programmable LED five-ring and eight-zone surface cold light source with laser pointer

光學(xué)鏡頭

Optical Lens

原裝POMEAS高清晰度自動變倍帶同軸光鏡頭（影像放大倍率28X-180X）

Original POMEAS High-definition automatic zooming coaxial optical len

(image magnification 28X-180X)

馬達(dá)

Motor

三軸日本進(jìn)口松下伺服馬達(dá)

Three-axis original Japan Panasonic servo motor

運動控制系統(tǒng)

Control System

ACT420精準(zhǔn)控制系統(tǒng)

ACT420 precision control system

軟件

Measuring Software

精準(zhǔn)測量軟件INSPEC-CNC

Precision measurement software INSPEC-CNC

工作環(huán)境

Working Environment

溫度20℃±3℃，溫度變化<2℃/hr，濕度30～80%

Temperature 20℃±3℃, temperature change<2℃/hr, humidity 30～80%

電源

Power

220V/50Hz/10A

備注：可選配國產(chǎn)/進(jìn)口探針測頭和3D測量軟件系統(tǒng)來實現(xiàn)精準(zhǔn)測量高度功能。此系列最大行程可做到3000X5000X400（mm），也可以根據(jù)客戶具體要求非標(biāo)定制。Optional domestic imported probe measurement header and 3D measurement software system to achieve precise measurement high function.The maximum stroke of this series can reach 3000 × 5000 × 400（mm）. It can also be customized according to the specific requirements of customers.